ANALYSIS OF STRAINED-LAYER SUPERLATTICE EFFECTS ON DISLOCATION DENSITY REDUCTION IN GAAS ON SI SUBSTRATES

被引:91
作者
YAMAGUCHI, M
NISHIOKA, T
SUGO, M
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D O I
10.1063/1.100819
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O59 [应用物理学];
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页码:24 / 26
页数:3
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