IMPROVED QUANTIFICATION AND DETECTION LIMITS FOR OXYGEN ANALYSIS IN ALXGA1-XAS/GAAS MULTILAYERS WITH SECONDARY ION MASS-SPECTROSCOPY

被引：26

作者：

MEURIS, M

VANDERVORST, W

BORGHS, G

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576067

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1663 / 1672

页数：10

共 12 条

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