IMAGING OF DISLOCATIONS IN INP USING TRANSMISSION CATHODOLUMINESCENCE

被引：12

作者：

CHIN, AK ^{[1
]}

MAHAJAN, S ^{[1
]}

BALLMAN, AA ^{[1
]}

机构：

[1] BELL TEL LABS INC,HOLMDEL,NJ 07733

来源：

APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 10期

关键词：

D O I：

10.1063/1.90978

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present an exact one-to-one correspondence between grown-in dislocations revealed as etch pits and dark spots observed on transmission cathodoluminescence images of InP. This correspondence has been demonstrated for heavily tellurium- and sulfur-doped InP. This is the first time that dislocations have been identified and imaged in InP using a luminescence technique.

引用

页码：784 / 786

页数：3

共 15 条

[1] BALK LJ, 1976, IITRI SEM, P258
[2] EFFECT OF DISLOCATIONS ON GREEN ELECTROLUMINESCENCE EFFICIENCY IN GAP GROWN BY LIQUID-PHASE EPITAXY
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[3] EVALUATION OF DEFECTS IN INP AND INGAASP BY TRANSMISSION CATHODOLUMINESCENCE
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[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) : 5707 - 5709
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[5] ROOM-TEMPERATURE CW OPERATION OF GALNASP-INP DOUBLE-HETEROSTRUCTURE DIODE-LASERS EMITTING AT 1.1 MU-M
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[7] GAINASP-INP AVALANCHE PHOTO-DIODES
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[8] X-RAY TOPOGRAPHIC STUDY OF DARK-SPOT DEFECTS IN GAAS-GA1-XALXAS DOUBLE-HETEROSTRUCTURE WAFERS
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[J]. APPLIED PHYSICS LETTERS, 1975, 27 (04) : 207 - 209
[9] LEE TP, 1978, IEDM55 PAP
[10] CHARACTERIZATION OF HIGHLY-ZINC-DOPED INP CRYSTALS
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CHIN, AK
MILLER, DC
[J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 165 - 168

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