MODELING OF LATTICE DAMAGE ACCUMULATION DURING HIGH-ENERGY ION-IMPLANTATION

被引：11

作者：

HECKING, N ^{[1
]}

KAAT, EHT ^{[1
]}

机构：

[1] UNIV DORTMUND, INST PHYS, W-4600 DORTMUND 50, GERMANY

来源：

APPLIED SURFACE SCIENCE | 1989年 / 43卷

关键词：

D O I：

10.1016/0169-4332(89)90195-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：87 / 96

页数：10

共 39 条

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