USE OF HCI GETTERING IN SILICON DEVICE PROCESSING

被引：74

作者：

ROBINSON, PH

HEIMAN, FP

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1971年 / 118卷 / 01期

关键词：

D O I：

10.1149/1.2407929

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：141 / +

页数：1

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