CHARACTERIZATION OF THE SI/GAAS(110) INTERFACE BY SOFT-X-RAY SURFACE X-RAY-ABSORPTION FINE-STRUCTURE

被引:2
作者
HASNAOUI, ML
FLANK, AM
DELAUNAY, R
LAGARDE, P
机构
[1] Cent Universitaire, Orsay
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 01期
关键词
D O I
10.1116/1.587988
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 [电气工程]; 0809 [电子科学与技术];
摘要
Surface x-ray absorption fine structure experiments have been carried out on the system Si/GaAs(110) at coverages ranging from 0.8 to around 2 monolayers (ML) and at room temperature. Polarized experiments have allowed us to propose a model for the silicon adsorption site that has the initial silicon atoms sitting just above the middle of the As-As and Ga-Ga bond along the [001] direction. Above one monolayer, silicon atoms begin to be ordered with a siliconlike structure. At thicker coverages (above 3 ML) the silicon layer is amorphous, which permits a determination of the thickness probed by x-ray absorption using the total electron yield technique.
引用
收藏
页码:69 / 76
页数:8
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