CONVERSION OF SI TO EPITAXIAL SIC BY REACTION WITH C2H2

被引：150

作者：

MOGAB, CJ ^{[1
]}

LEAMY, HJ ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 03期

关键词：

D O I：

10.1063/1.1663370

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1075 / 1084

页数：10

相关论文

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