ULTRASHORT ELECTRON-PULSE PROBING OF INTEGRATED-CIRCUITS

被引:6
作者
HALBOUT, JM
MAY, P
CHIU, G
机构
关键词
D O I
10.1080/713822322
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:1995 / 2005
页数:11
相关论文
共 37 条
[1]  
ARJAVALINGHAM G, 1988, INTERCONNECTION HIGH
[2]  
Balk L. J., 1976, Scanning Electron Microscopy 1976. I, P615
[3]  
Clauberg R., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V795, P207
[4]   BEAM CHOPPER FOR SUB-NANOSECOND PULSES IN SCANNING ELECTRON-MICROSCOPY [J].
FEUERBAUM, HP ;
OTTO, J .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (06) :529-532
[5]   ELECTRON-BEAM TESTING - METHODS AND APPLICATIONS [J].
FEUERBAUM, HP .
SCANNING, 1983, 5 (01) :14-24
[6]  
FEUERBAUM HP, 1979, SEM, V1, P285
[7]   ANALYSIS OF THE TRANSIT-TIME EFFECT ON THE STROBOSCOPIC VOLTAGE CONTRAST IN THE SCANNING ELECTRON-MICROSCOPE [J].
FUJIOKA, H ;
NAKAMAE, K ;
URA, K .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1985, 18 (06) :1019-1027
[8]   MAGNETIC-FIELD EXTRACTION OF SECONDARY ELECTRONS FOR ACCURATE INTEGRATED-CIRCUIT VOLTAGE MEASUREMENT [J].
GARTH, SCJ ;
NIXON, WC ;
SPICER, DF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :217-220
[9]   HEMISPHERICAL RETARDING TYPE ENERGY ANALYZER FOR IC TESTING BY ELECTRON-BEAM [J].
GOTO, Y ;
ITO, A ;
FURUKAWA, Y ;
INAGAKI, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1030-1032
[10]  
HALBOUT JM, 1988, ISSCC, P82