GAS-PHASE AND SURFACE-REACTIONS IN THE MOCVD OF GAAS FROM TRIETHYLGALLIUM, TRIMETHYLGALLIUM, AND TERTIARYBUTYLARSINE

被引：32

作者：

OMSTEAD, TR ^{[1
]}

VANSICKLE, PM ^{[1
]}

LEE, PW ^{[1
]}

JENSEN, KF ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT CHEM ENGN & MAT SCI,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 93卷 / 1-4期

关键词：

The authorsa re gratefult o the NationalS ci-ence Foundationfo r support of this work and would like to thank Kevin Sieferinga nd Dr. Mountziarisfo r helpfuld iscussions;

D O I：

10.1016/0022-0248(88)90500-3

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：20 / 28

页数：9

共 16 条

[1] USE OF TERTIARYBUTYLARSINE FOR GAAS GROWTH [J].

CHEN, CH ;

LARSEN, CA ;

STRINGFELLOW, GB .

APPLIED PHYSICS LETTERS, 1987, 50 (04) :218-220

[2]

Coates G.E., 1967, ORGANOMETALLIC COMPO

[3] PREPARATION OF INDIUM ANTIMONIDE AND GALLIUM ARSENIDE FILMS [J].

HARRISON, BC ;

TOMPKINS, EH .

INORGANIC CHEMISTRY, 1962, 1 (04) :951-&

[4] PYROLYSIS OF TRIMETHYL GALLIUM [J].

JACKO, MG ;

PRICE, SJW .

CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1963, 41 (06) :1560-&

[5] DETERMINATION OF THE TOTAL EMITTANCE OF NORMAL-TYPE GAAS WITH APPLICATION TO CZOCHRALSKI GROWTH [J].

JORDAN, AS .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (04) :2218-2227

[6]

Kuech T. F., 1987, Material Science Reports, V2, P1, DOI 10.1016/0920-2307(87)90002-8

[7] REACTION-MECHANISMS IN THE ORGANOMETALLIC VAPOR-PHASE EPITAXIAL-GROWTH OF GAAS [J].

LARSEN, CA ;

BUCHAN, NI ;

STRINGFELLOW, GB .

APPLIED PHYSICS LETTERS, 1988, 52 (06) :480-482

[8] MOCVD IN INVERTED STAGNATION POINT FLOW .1. DEPOSITION OF GAAS FROM TMAS AND TMGA [J].

LEE, P ;

MCKENNA, D ;

KAPUR, D ;

JENSEN, KF .

JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) :120-127

[9] INSITU MASS-SPECTROSCOPY STUDIES OF THE DECOMPOSITION OF ORGANOMETALLIC ARSENIC COMPOUNDS IN THE PRESENCE OF GA(CH3)3 AND GA(C2H5)3 [J].

LEE, PW ;

OMSTEAD, TR ;

MCKENNA, DR ;

JENSEN, KF .

JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) :134-142

[10] INSITU MASS-SPECTROSCOPY AND THERMOGRAVIMETRIC STUDIES OF GAAS MOCVD GAS-PHASE AND SURFACE-REACTIONS [J].

LEE, PW ;

OMSTEAD, TR ;

MCKENNA, DR ;

JENSEN, KF .

JOURNAL OF CRYSTAL GROWTH, 1987, 85 (1-2) :165-174

← 1 2 →