PRELIMINARY RESULTS OF AN ION SCATTERING STUDY OF PHOSPHOSILICATE GLASS GETTERING

被引：15

作者：

MEEK, RL ^{[1
]}

GIBBON, CF ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1974年 / 121卷 / 03期

关键词：

D O I：

10.1149/1.2401834

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：444 / 447

页数：4

共 19 条

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[J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (10) : 1821 - 1824
[8] DIFFUSION + SOLUBILITY OF COPPER IN EXTRINSIC + INTRINSIC GERMANIUM SILICON + GALLIUM ARSENIDE
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[9] GETTERING OF METALLIC IMPURITIES FROM PLANAR SILICON DIODES
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (06) : 533 - 537
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[J]. SOLID-STATE ELECTRONICS, 1968, 11 (11) : 1055 - &

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