DETERMINATION OF THE POWER AND CURRENT DENSITIES IN ARGON AND OXYGEN PLASMAS BY INSITU TEMPERATURE-MEASUREMENTS

被引：54

作者：

VISSER, RJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.575750

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：189 / 194

页数：6

共 23 条

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