HIGH-RESOLUTION SHADOW IMAGE SUPERIMPOSED ON LACBED PATTERNS - A METHOD DEMONSTRATED ON GEXSI1-X/SI SUPERLATTICE

被引：17

作者：

DUAN, XF

机构：

[1] Beijing Laboratory of Electron Microscopy, Chinese Academy of Sciences, Beijing, 100080

来源：

ULTRAMICROSCOPY | 1992年 / 41卷 / 1-3期

关键词：

D O I：

10.1016/0304-3991(92)90114-Y

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Large-angle convergent-beam electron diffraction patterns superimposed on a high-spatial-resolution shadow image of a cross-sectional specimen of the GexSi1-x/Si strained-layer superlattice has been obtained by using an electron beam with a rather small spot size in a Philips EM420 electron microscope working at 100 kV and room temperature. As an example, such a CBED shadow image can provide information about the changes in the lattice parameters, localized variations in strain, and the surface relaxation effect.

引用

页码：249 / 252

页数：4

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