INFLUENCE OF ION-BOMBARDMENT ON THE INTERACTION OF SB WITH THE SI(100) SURFACE

被引：6

作者：

BARNETT, SA

WINTERS, HF

GREENE, JE

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] IBM,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

SURFACE SCIENCE | 1987年 / 181卷 / 03期

关键词：

D O I：

10.1016/0039-6028(87)90208-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：596 / 603

页数：8

共 18 条

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[8] ION SURFACE INTERACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH BY SPUTTERING, MBE, AND PLASMA-ENHANCED CVD - APPLICATIONS TO SEMICONDUCTORS [J].

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BARNETT, SA .

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[9] SECONDARY IMPLANTATION OF SB INTO SI MOLECULAR-BEAM EPITAXY LAYERS [J].

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[10] NUCLEATION, GROWTH AND TRANSFORMATION OF AMORPHOUS AND CRYSTALLINE SOLIDS CONDENSING FROM THE GAS-PHASE [J].

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SNEED, RJ .

ASTROPHYSICS AND SPACE SCIENCE, 1979, 65 (01) :129-154

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