REACTIVE SCHOTTKY-BARRIER FORMATION - THE PD-SI INTERFACE

被引:28
作者
FREEOUF, JL
RUBLOFF, GW
HO, PS
KUAN, TS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期
关键词
D O I
10.1116/1.570616
中图分类号
O59 [应用物理学];
学科分类号
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页码:916 / 919
页数:4
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