OBSERVATION OF VELOCITY OVERSHOOT IN SILICON INVERSION-LAYERS

被引:33
作者
ASSADERAGHI, F
KO, PK
HU, CM
机构
[1] Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
关键词
D O I
10.1109/55.244738
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Employing a novel test structure, electron velocity overshoot in silicon inversion layers is observed at room temperature. For channel lengths longer than 0.3 mum, the velocity/field relation follows the well-known behavior with no channel length dependence. The first indication of velocity overshoot is seen at channel length of 0.22 mum, while at L = 0.12 mum drift velocities up to 35% larger than the long channel value are measured.
引用
收藏
页码:484 / 486
页数:3
相关论文
共 8 条