共 15 条
- [1] Antognetti P., 1981, International Electron Devices Meeting, P574
- [3] COOPER JA, 1981, ELECTRON DEVIC LETT, V2, P171, DOI 10.1109/EDL.1981.25387
- [4] Dennard R., 1972, IEDM, P344
- [9] LITHOGRAPHY FOR ULTRASHORT CHANNEL SILICON FIELD-EFFECT TRANSISTOR-CIRCUITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 140 - 145