MEASUREMENTS OF DIFFUSION-COEFFICIENT OF CF2 RADICAL IN DC PULSED CF4 DISCHARGE PLASMA

被引：18

作者：

ARAI, T ^{[1
]}

GOTO, M ^{[1
]}

ASOH, Y ^{[1
]}

TAKAYAMA, D ^{[1
]}

SHIMIZU, T ^{[1
]}

机构：

[1] USHIO INC, MIDORI KU, YOKOHAMA 227, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1993年 / 32卷 / 10A期

关键词：

D O I：

10.1143/JJAP.32.L1469

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Laser-induced fluorescence has been used to measure the CF2 radical ground-state densities after extinction of DC pulsed CF4 discharge plasma. From the measurement, the CF2 radical was shown to be removed mainly by a diffusion process. Its diffusion coefficient was found to be D=65 cm2.Torr.s-1 in CF4 at room temperature.

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收藏

页码：L1469 / L1470

页数：2

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共 9 条

[1] DETERMINATION OF MASS-TRANSPORT COEFFICIENTS AND VIBRATIONAL-RELAXATION RATES OF SPECIES FORMED IN LASER PHOTOLYSIS EXPERIMENTS [J].

BIALKOWSKI, SE ;

KING, DS ;

STEPHENSON, JC .

JOURNAL OF CHEMICAL PHYSICS, 1980, 72 (02) :1156-1160

[2] SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA [J].

BOOTH, JP ;

HANCOCK, G ;

PERRY, ND ;

TOOGOOD, MJ .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (11) :5251-5257

[3] LASER-INDUCED FLUORESCENCE DETECTION OF CF AND CF2 RADICALS IN A CF4/O2 PLASMA [J].

BOOTH, JP ;

HANCOCK, G ;

PERRY, ND .

APPLIED PHYSICS LETTERS, 1987, 50 (06) :318-319

[4] OPTICAL TECHNIQUES IN PLASMA DIAGNOSTICS [J].

GOTTSCHO, RA ;

MILLER, TA .

PURE AND APPLIED CHEMISTRY, 1984, 56 (02) :189-208

[5] FORMATION AND DECAY OF METASTABLE FLUORINE-ATOMS IN PULSED FLUOROCARBON OXYGEN DISCHARGES MONITORED BY LASER-INDUCED FLUORESCENCE [J].

HANSEN, SG ;

LUCKMAN, G ;

NIEMAN, GC ;

COLSON, SD .

APPLIED PHYSICS LETTERS, 1990, 56 (08) :719-721

[6] MEASUREMENTS OF F-STAR, CF, AND CF2 FORMATION AND DECAY IN PULSED FLUOROCARBON DISCHARGES [J].

HANSEN, SG ;

LUCKMAN, G ;

COLSON, SD .

APPLIED PHYSICS LETTERS, 1988, 53 (17) :1588-1590

[7] SPECTROSCOPY AND PHOTOPHYSICS OF THE CF2A 1B1-X 1A1 SYSTEM [J].

KING, DS ;

SCHENCK, PK ;

STEPHENSON, JC .

JOURNAL OF MOLECULAR SPECTROSCOPY, 1979, 78 (01) :1-15

[8] MEASUREMENTS OF THE CF RADICAL IN DC PULSED CF4/H2 DISCHARGE PLASMA USING INFRARED DIODE-LASER ABSORPTION-SPECTROSCOPY [J].

MAGANE, M ;

ITABASHI, N ;

NISHIWAKI, N ;

GOTO, T ;

YAMADA, C ;

HIROTA, E .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (05) :L829-L832

[9] A MODEL OF THE CHEMICAL PROCESSES OCCURRING IN CF-4/O2 DISCHARGES USED IN PLASMA-ETCHING [J].

PLUMB, IC ;

RYAN, KR .

PLASMA CHEMISTRY AND PLASMA PROCESSING, 1986, 6 (03) :205-230