RUTHERFORD BACKSCATTERING ANALYSIS OF PHOSPHORUS GETTERING OF GOLD AND COPPER

被引：2

作者：

HARTITI, B

HAGEALI, M

MULLER, JC

SIFFERT, P

机构：

[1] Centre de Recherches Nucléaires (IN2P3), Laboratoire PHASE (UPR du CNRS 292), Strasbourg Cedex 2

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 26期

关键词：

D O I：

10.1063/1.109025

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The extrinsic gettering of Au and Cu by phosphorus diffusion in a classical or rapid thermal furnace has been analyzed by Rutherford backscattering (RBS) measurements. Accumulation of Au and Cu in the phosphorus-doped region has been clearly evidenced after classical or rapid thermal diffusion of phosphorus from a spin-on deposited silicon glass source in the temperature range 950-1050-degrees-C for typical durations of 15 min and 25 s, respectively, confirming the existence of classical as well as a rapid thermal gettering effect.

引用

页码：3476 / 3478

页数：3

共 19 条

[1]

BORISENKO VE, 1983, LASER SOLID INTERACT, V13, P375

[2] GETTERING OF GOLD IN SILICON - A TOOL FOR UNDERSTANDING THE PROPERTIES OF SILICON INTERSTITIALS [J].