SIO2 ULTRA THIN-FILM GROWTH-KINETICS AS INVESTIGATED BY SURFACE TECHNIQUES

[31] Silicon Oxidation Studies: The Role of H2O [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (11) : 1757 - 1761

[32] SILICON OXIDATION STUDIES - ANALYSIS OF SIO2 FILM GROWTH DATA [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (09) : 1380 - 1384

[33] IRENE EA, 1978, J ELECTROCHEM SOC, V125, P1709

[34] SI-SIO2 INTERFACE CHARACTERIZATION BY ESCA [J]. SURFACE SCIENCE, 1979, 84 (02) : 355 - 374

[35] AUGER ANALYSIS OF SIO2-SI INTERFACE [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (07) : 3028 - 3037

[36] INVESTIGATION OF SILICON-OXYGEN INTERACTIONS USING AUGER ELECTRON SPECTROSCOPY [J]. SURFACE SCIENCE, 1971, 27 (03) : 499 - &

[37] THERMAL-OXIDATION OF SILICON IN VARIOUS OXYGEN PARTIAL PRESSURES DILUTED BY NITROGEN [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) : 2891 - 2896

[38] CORE-ELECTRON EXCITATION-SPECTRA OF SI, SIO, AND SIO2 [J]. PHYSICAL REVIEW LETTERS, 1975, 35 (02) : 107 - 110

[39] HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF SI-SIO2 INTERFACE [J]. APPLIED PHYSICS LETTERS, 1978, 32 (07) : 437 - 439

[40] THE STRUCTURE OF ULTRATHIN OXIDE ON SILICON [J]. APPLIED PHYSICS LETTERS, 1980, 37 (04) : 392 - 394

[31] Silicon Oxidation Studies: The Role of H2O [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (11) : 1757 - 1761

[32] SILICON OXIDATION STUDIES - ANALYSIS OF SIO2 FILM GROWTH DATA [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (09) : 1380 - 1384

[33] IRENE EA, 1978, J ELECTROCHEM SOC, V125, P1709

[34] SI-SIO2 INTERFACE CHARACTERIZATION BY ESCA [J]. SURFACE SCIENCE, 1979, 84 (02) : 355 - 374

[35] AUGER ANALYSIS OF SIO2-SI INTERFACE [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (07) : 3028 - 3037

[36] INVESTIGATION OF SILICON-OXYGEN INTERACTIONS USING AUGER ELECTRON SPECTROSCOPY [J]. SURFACE SCIENCE, 1971, 27 (03) : 499 - &

[37] THERMAL-OXIDATION OF SILICON IN VARIOUS OXYGEN PARTIAL PRESSURES DILUTED BY NITROGEN [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) : 2891 - 2896

[38] CORE-ELECTRON EXCITATION-SPECTRA OF SI, SIO, AND SIO2 [J]. PHYSICAL REVIEW LETTERS, 1975, 35 (02) : 107 - 110

[39] HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF SI-SIO2 INTERFACE [J]. APPLIED PHYSICS LETTERS, 1978, 32 (07) : 437 - 439

[40] THE STRUCTURE OF ULTRATHIN OXIDE ON SILICON [J]. APPLIED PHYSICS LETTERS, 1980, 37 (04) : 392 - 394