PERIODIC CONDUCTANCE FLUCTUATIONS IN QUASI-ONE-DIMENSIONAL METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS WITH SHALLOW-TRENCH ISOLATIONS

被引:10
作者
TAKEUCHI, K [1 ]
NEWBURY, R [1 ]
机构
[1] UNIV CAMBRIDGE,CAVENDISH LAB,CAMBRIDGE CB3 0HE,ENGLAND
来源
PHYSICAL REVIEW B | 1991年 / 43卷 / 09期
关键词
D O I
10.1103/PhysRevB.43.7324
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Results of conductance measurements in 0.2-mu-m-wide and 0.15-mu-m-long silicon metal-oxide-semiconductor field-effect transitions with shallow-trench isolations are presented. At T = 1.2 K, two kinds of periodic conductance fluctuations are observed; fine structure near threshold and plateaus in the higher conductance regime (approximately 0.1 mS). The latter are accentuated by applying moderate magnetic fields of 1-2 T, remaining unchanged in their positions. We attribute these features to a quasi-one-dimensional transport mechanism caused by strain-induced narrow potential wells along the trench isolations.
引用
收藏
页码:7324 / 7327
页数:4
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