ROLE OF MASS-TRANSPORT IN LASER-INDUCED CHEMISTRY

被引:15
作者
KODAS, TT [1 ]
COMITA, PB [1 ]
机构
[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120
关键词
D O I
10.1021/ar00174a004
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
[No abstract available]
引用
收藏
页码:188 / 194
页数:7
相关论文
共 49 条
[1]   DIFFUSION SUPPRESSION OF PHOTOLYTIC FRAGMENTS ON LASER-INDUCED CHEMICAL VAPOR-DEPOSITION [J].
ARAI, Y ;
YAMAGUCHI, S ;
OHSAKI, T .
APPLIED PHYSICS LETTERS, 1988, 52 (24) :2083-2085
[2]   CO2 LASER-ASSISTED DEPOSITION OF BORON AND PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON [J].
BILENCHI, R ;
GIANINONI, I ;
MUSCI, M ;
MURRI, R ;
TACCHETTI, S .
APPLIED PHYSICS LETTERS, 1985, 47 (03) :279-281
[3]   HYDROGENATED AMORPHOUS-SILICON GROWTH BY CO2-LASER PHOTO-DISSOCIATION OF SILANE [J].
BILENCHI, R ;
GIANINONI, I ;
MUSCI, M .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) :6479-6481
[4]   STUDY OF UF6 PHOTO-DISSOCIATION THROUGH LIGHT-SCATTERING OF UF5 PARTICLES [J].
BORSELLA, E ;
CATONI, F ;
FREDDI, G .
JOURNAL OF CHEMICAL PHYSICS, 1980, 73 (01) :316-321
[5]  
BOUDART M, 1984, KINETICS HETEROGENEO, P44
[6]  
CHEN JC, 1988, J VAC SCI TECHNOL A, V5, P3386
[7]   MODULATED LASER-BEAM RELAXATION SPECTROMETRY OF LASER-INDUCED CHEMICAL VAPOR-DEPOSITION [J].
COMITA, PB ;
KODAS, TT .
APPLIED PHYSICS LETTERS, 1987, 51 (24) :2059-2061
[8]  
Crank J., 1979, MATH DIFFUSION, V2nd
[9]  
DAVIS EJ, 1981, ADV COLLOID INTERFAC, V15, P1
[10]   ULTRAFINE METAL-PARTICLE FORMATION VIA PULSED LASER BREAKDOWN OF CARBONYL VAPORS [J].
DRAPER, CW .
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1980, 11 (02) :349-351