DIFFUSION SUPPRESSION OF PHOTOLYTIC FRAGMENTS ON LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引：3

作者：

ARAI, Y

YAMAGUCHI, S

OHSAKI, T

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 24期

关键词：

D O I：

10.1063/1.99581

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2083 / 2085

页数：3

共 10 条

[1] LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SI AND GE FILMS BY ULTRAVIOLET-LASER PHOTO-DISSOCIATION OF SILANE AND GERMANE [J].

ANDREATTA, RW ;

ABELE, CC ;

OSMUNDSEN, JF ;

EDEN, JG ;

LUBBEN, D ;

GREENE, JE .

APPLIED PHYSICS LETTERS, 1982, 40 (02) :183-185

[2] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD [J].

BAUM, TH ;

JONES, CR .

APPLIED PHYSICS LETTERS, 1985, 47 (05) :538-540

[3] VACUUM ULTRAVIOLET DRIVEN CHEMICAL VAPOR-DEPOSITION OF LOCALIZED ALUMINUM THIN-FILMS [J].

CALLOWAY, AR ;

GALANTOWICZ, TA ;

FENNER, WR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :534-536

[4] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J].

DEUTSCH, TF ;

EHRLICH, DJ ;

OSGOOD, RM .

APPLIED PHYSICS LETTERS, 1979, 35 (02) :175-177

[5] PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01) :23-32

[6] SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

APPLIED PHYSICS LETTERS, 1981, 38 (11) :946-948

[7] COLUMN-IIIA METAL-FILM DEPOSITION BY DISSOCIATIVE PHOTOIONIZATION OF METAL HALIDE VAPORS [J].

GEOHEGAN, DB ;

EDEN, JG .

APPLIED PHYSICS LETTERS, 1984, 45 (10) :1146-1148

[8] LASER CHEMICAL VAPOR-DEPOSITION OF COPPER [J].

HOULE, FA ;

JONES, CR ;

BAUM, T ;

PICO, C ;

KOVAC, CA .

APPLIED PHYSICS LETTERS, 1985, 46 (02) :204-206

[9] PHOTODEPOSITION OF ALUMINUM-OXIDE AND ALUMINUM THIN-FILMS [J].

SOLANKI, R ;

RITCHIE, WH ;

COLLINS, GJ .

APPLIED PHYSICS LETTERS, 1983, 43 (05) :454-456

[10] PATTERNED PHOTONUCLEATION OF CHEMICAL VAPOR-DEPOSITION OF AL BY UV-LASER PHOTODEPOSITION [J].

TSAO, JY ;

EHRLICH, DJ .

APPLIED PHYSICS LETTERS, 1984, 45 (06) :617-619

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