ROLE OF MASS-TRANSPORT IN LASER-INDUCED CHEMISTRY

被引:15
作者
KODAS, TT [1 ]
COMITA, PB [1 ]
机构
[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120
关键词
D O I
10.1021/ar00174a004
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
[No abstract available]
引用
收藏
页码:188 / 194
页数:7
相关论文
共 49 条
[41]  
SATO T, 1982, JPN J APPL PHYS, V211, P1599
[42]   KINETICS AND MECHANISM OF AMORPHOUS HYDROGENATED SILICON GROWTH BY HOMOGENEOUS CHEMICAL VAPOR-DEPOSITION [J].
SCOTT, BA ;
PLECENIK, RM ;
SIMONYI, EE .
APPLIED PHYSICS LETTERS, 1981, 39 (01) :73-75
[43]  
Seinfeld J. H., 1986, ATMOSPHERIC CHEM PHY
[44]   MODELING OF PYROLYTIC LASER-ASSISTED CHEMICAL VAPOR-DEPOSITION - MASS-TRANSFER AND KINETIC EFFECTS INFLUENCING THE SHAPE OF THE DEPOSIT [J].
SKOUBY, DC ;
JENSEN, KF .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (01) :198-206
[45]   DEPOSITION OF POLYCRYSTALLINE AND AMORPHOUS-SILICON BY INFRARED-LASER IRRADIATION OF SILANE [J].
TONNEAU, D ;
AUVERT, G ;
PAULEAU, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :670-672
[46]   SIMPLE CLASSICAL MODEL FOR TRAPPING IN GAS-SURFACE INTERACTIONS [J].
WEINBERG, WH ;
MERRILL, RP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (06) :718-&
[47]   ULTRAVIOLET PHOTO-DECOMPOSITION FOR METAL-DEPOSITION - GAS VERSUS SURFACE PHASE PROCESSES [J].
WOOD, TH ;
WHITE, JC ;
THACKER, BA .
APPLIED PHYSICS LETTERS, 1983, 42 (05) :408-410
[48]   LASER-PRODUCTION OF NAH CRYSTALLINE PARTICLES [J].
YABUZAKI, T ;
SATO, T ;
OGAWA, T .
JOURNAL OF CHEMICAL PHYSICS, 1980, 73 (06) :2780-2783
[49]   A THEORY OF PLASMA-ASSISTED CHEMICAL VAPOR TRANSPORT PROCESSES [J].
ZAROWIN, CB .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (03) :929-942