ARSENIC PASSIVATION OF MOMBE GROWN GAAS-SURFACES

被引:13
作者
SCHAFER, BJ [1 ]
FORSTER, A [1 ]
LONDSCHIEN, M [1 ]
TULKE, A [1 ]
WERNER, K [1 ]
KAMP, M [1 ]
HEINECKE, H [1 ]
WEYERS, M [1 ]
LUTH, H [1 ]
BALK, P [1 ]
机构
[1] RHEIN WESTFAL TH AACHEN,INST SEMICOND ELECTR,D-5100 AACHEN,FED REP GER
关键词
D O I
10.1016/0039-6028(88)90228-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:485 / 490
页数:6
相关论文
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