ON THE DETERMINATION OF THE SPATIAL-DISTRIBUTION OF DEEP CENTERS IN SEMICONDUCTING THIN-FILMS FROM CAPACITANCE TRANSIENT SPECTROSCOPY

被引：175

作者：

ZOHTA, Y

WATANABE, MO

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 03期

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D O I：

10.1063/1.330683

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1809 / 1811

页数：3

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