TEXTURE DEVELOPMENT IN THIN METALLIC-FILMS

被引：8

作者：

KNORR, DB

TRACY, DP

LU, TM

机构：

来源：

TEXTURES AND MICROSTRUCTURES | 1991年 / 14卷

关键词：

D O I：

10.1155/TSM.14-18.543

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：543 / 554

页数：12

共 10 条

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[5]

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[6] A HIGH IONIZATION EFFICIENCY SOURCE FOR PARTIALLY IONIZED BEAM DEPOSITION [J].

MEI, SN ;

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[7]

TRACY BM, 1988, MICROSTRUCT SCI, P157

[8] EFFECT OF TEXTURE AND GRAIN-STRUCTURE ON ELECTROMIGRATION IN AL-0.5-PERCENT CU THIN-FILMS [J].

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[10] PARTIALLY IONIZED BEAM DEPOSITION OF ORIENTED FILMS [J].

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MADDEN, M .

JOURNAL OF MATERIALS RESEARCH, 1989, 4 (02) :343-349

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