FORMATION OF THE NI-SIC(001) INTERFACE STUDIED BY HIGH-RESOLUTION ION BACKSCATTERING

被引:38
作者
SLIJKERMAN, WFJ
FISCHER, AEMJ
VANDERVEEN, JF
OHDOMARI, I
YOSHIDA, S
MISAWA, S
机构
[1] WASEDA UNIV,SCH SCI & ENGN,SHINJUKU KU,TOKYO 160,JAPAN
[2] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN
关键词
D O I
10.1063/1.343535
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:666 / 673
页数:8
相关论文
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