HIGH-RESOLUTION IMAGING WITH HIGH-ENERGY ION-BEAMS

被引：46

作者：

LEGGE, GJF

LAIRD, JS

MASON, LM

SAINT, A

CHOLEWA, M

JAMIESON, DN

机构：

[1] Micro Analytical Research Centre (MARC), School of Physics, University of Melbourne, Parkville

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(93)95539-H

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The limits to high spatial resolution and the requirements for its achievement are discussed. A decade of evolution in high energy ion microscopy is reviewed, the principles, performances and possibilities of the many techniques are discussed. The resultant extreme demands placed upon the microprobe system are described. Finally, possibilities of, requirements for and progress towards nanometre resolution are reviewed.

引用

页码：153 / 168

页数：16

共 70 条

[1] CHARACTERISTICS OF A HYDROGEN GAS-FIELD ION-SOURCE FOR MICROPROBE APPLICATION
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LEGGE, GJF
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[2] CHARGE COLLECTION ION MICROSCOPY - IMAGING OF DEFECTS IN SEMICONDUCTORS WITH A POSITIVE-ION MICROBEAM
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[3] APPLICATIONS OF ENERGY-LOSS CONTRAST STIM
BENCH, G
SAINT, A
LEGGE, GJF
CHOLEWA, M
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 77 (1-4) : 175 - 183
[4] THE MAPPING OF UNRESOLVED SPATIAL STRUCTURE IN STIM IMAGES
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LEFEVRE, HW
LEGGE, GJF
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 54 (1-3) : 378 - 382
[5] HIGH-RESOLUTION STIM
BENCH, GS
LEGGE, GJF
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 655 - 658
[6] BENCH GS, IN PRESS
[7] MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE
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KING, PJC
GRIME, GW
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[J]. JOURNAL OF APPLIED PHYSICS, 1992, 72 (06) : 2097 - 2104
[8] A HIGH BRIGHTNESS LITHIUM METAL-ION SOURCE FOR NUCLEAR MICROPROBE APPLICATIONS
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COOKSON, JA
COLE, JM
LEDBURY, AE
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 54 (1-3) : 12 - 16
[9] THE GENERATION AND APPLICATIONS OF ION-BEAM-INDUCED CHARGE IMAGES
BREESE, MBH
GRIME, GW
WATT, F
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 77 (1-4) : 301 - 311
[10] TOTAL CORRECTION OF PARASITIC SEXTUPOLE COMPONENTS IN MAGNETIC QUADRUPOLE LENSES
BREESE, MBH
JAMIESON, DN
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 54 (1-3) : 28 - 32

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