ION-PLATED ALUMINUM-ALUMINUM OXIDE COATINGS USING A PULSED OXYGEN PROCESS

被引：2

作者：

AHMED, NAG ^{[1
]}

机构：

[1] RADCLIFFE LTD,MANCHESTER M26 9UR,ENGLAND

来源：

THIN SOLID FILMS | 1986年 / 144卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90073-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：103 / 116

页数：14

共 15 条

[1] A SIMPLE AND INEXPENSIVE ROTATING BARREL TO ION PLATE SMALL COMPONENTS [J].

AHMED, NAG ;

TEER, DG .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (05) :411-416

[2]

AHMED NAG, 1986, UNPUB VACUUM

[3]

AHMED NAG, 1980, NUCL INSTRUM METH, V168, P281

[4]

AHMED NAG, 1982, 4TH INT C PLASM SPUT, P191

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[6] PREPARATION AND PROPERTIES OF AL2O3 FILMS BY DC AND RF MAGNETRON SPUTTERING [J].

DESHPANDEY, C ;

HOLLAND, L .

THIN SOLID FILMS, 1982, 96 (03) :265-270

[7]

HOFFMAN D, 1971, J VAC SCI TECHNOL, V9, P326

[8] PHYSICAL PROCESSES IN THE SUBSTRATE DARK SPACE IN BIASED DEPOSITION SYSTEMS [J].

HURLEY, RE .

THIN SOLID FILMS, 1981, 86 (2-3) :241-253

[9] CHARACTERISTICS OF A THERMIONICALLY ASSISTED TRIODE ION-PLATING SYSTEM [J].

MATTHEWS, A ;

TEER, DG .

THIN SOLID FILMS, 1981, 80 (1-3) :41-48

[10] ALUMINUM ALUMINUM-NITRIDE SPUTTER DEPOSITION ON THE INERTIAL FUSION TARGET USING THE PULSED-GAS PROCESS [J].

NOYES, SG ;

KIM, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :1201-1203

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