PHYSICAL PROCESSES IN THE SUBSTRATE DARK SPACE IN BIASED DEPOSITION SYSTEMS

被引：10

作者：

HURLEY, RE

机构：

来源：

THIN SOLID FILMS | 1981年 / 86卷 / 2-3期

关键词：

D O I：

10.1016/0040-6090(81)90293-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：241 / 253

页数：13

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