COMPOSITION AND THERMAL-STABILITY OF THIN NATIVE OXIDES ON INP

被引：71

作者：

WAGER, JF

ELLSWORTH, DL

GOODNICK, SM

WILMSEN, CW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571049

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：513 / 518

页数：6

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