ARGON-OXYGEN INTERACTION IN RF-SPUTTERING GLOW-DISCHARGES

被引：32

作者：

AITA, CR

MARHIC, ME

机构：

[1] NORTHWESTERN UNIV,DEPT ELECT ENGN & COMP SCI,EVANSTON,IL 60201

[2] GOULD LABS,ROLLING MEADOWS,IL 60008

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 11期

关键词：

D O I：

10.1063/1.328610

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6584 / 6587

页数：4

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[9] GLOW-DISCHARGE MASS-SPECTROMETRY - TECHNIQUE FOR DETERMINING ELEMENTAL COMPOSITION PROFILES IN SOLIDS [J].

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