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DOUBLE HETEROEPITAXY IN THE SI (111)-COSI2-SI STRUCTURE
被引:130
作者
:
SAITOH, S
论文数:
0
引用数:
0
h-index:
0
SAITOH, S
ISHIWARA, H
论文数:
0
引用数:
0
h-index:
0
ISHIWARA, H
FURUKAWA, S
论文数:
0
引用数:
0
h-index:
0
FURUKAWA, S
机构
:
来源
:
APPLIED PHYSICS LETTERS
|
1980年
/ 37卷
/ 02期
关键词
:
D O I
:
10.1063/1.91825
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:203 / 205
页数:3
相关论文
共 9 条
[1]
EVIDENCE FOR VOID INTERCONNECTION IN EVAPORATED AMORPHOUS-SILICON FROM EPITAXIAL CRYSTALLIZATION MEASUREMENTS
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
POATE, JM
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 59
-
61
[2]
BOZLER CO, 1979, TECH DIG INT ELECTRO
[3]
CHARACTERIZATION OF EPITAXIAL METAL SILICIDE FILMS GROWN ON SILICON
ISHIWARA, H
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
ISHIWARA, H
HIKOSAKA, K
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
HIKOSAKA, K
NAGATOMO, M
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
NAGATOMO, M
FURUKAWA, S
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
FURUKAWA, S
[J].
SURFACE SCIENCE,
1979,
86
(JUL)
: 711
-
717
[4]
CHANNELING AND BACKSCATTERING STUDIES OF THE CRYSTALLINE PERFECTION AND THE THERMAL-STABILITY OF EPITAXIAL PTSI FILMS ON SI
ISHIWARA, H
论文数:
0
引用数:
0
h-index:
0
机构:
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
ISHIWARA, H
HIKOSAKA, K
论文数:
0
引用数:
0
h-index:
0
机构:
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
HIKOSAKA, K
论文数:
引用数:
h-index:
机构:
FURUKAWA, S
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(08)
: 5302
-
5306
[5]
ISHIWARA H, P S THIN FILM INTERF
[6]
SOLID-PHASE EPITAXY IN SILICIDE-FORMING SYSTEMS
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH, PASADENA, CA 91125 USA
CALTECH, PASADENA, CA 91125 USA
LAU, SS
LIAU, ZL
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH, PASADENA, CA 91125 USA
CALTECH, PASADENA, CA 91125 USA
LIAU, ZL
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH, PASADENA, CA 91125 USA
CALTECH, PASADENA, CA 91125 USA
NICOLET, MA
[J].
THIN SOLID FILMS,
1977,
47
(03)
: 313
-
322
[7]
HETEROSTRUCTURE BY SOLID-PHASE EPITAXY IN SI(111)-PD-SI(AMORPHOUS) SYSTEM
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
LAU, SS
LIAU, ZL
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
LIAU, ZL
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
NICOLET, MA
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
MAYER, JW
[J].
JOURNAL OF APPLIED PHYSICS,
1977,
48
(03)
: 917
-
919
[8]
SILICON EPITAXY BY SOLID-PHASE CRYSTALLIZATION OF DEPOSITED AMORPHOUS FILMS
ROTH, JA
论文数:
0
引用数:
0
h-index:
0
机构:
HUGHES RES LABS,MALIBU,CA 90265
HUGHES RES LABS,MALIBU,CA 90265
ROTH, JA
ANDERSON, CL
论文数:
0
引用数:
0
h-index:
0
机构:
HUGHES RES LABS,MALIBU,CA 90265
HUGHES RES LABS,MALIBU,CA 90265
ANDERSON, CL
[J].
APPLIED PHYSICS LETTERS,
1977,
31
(10)
: 689
-
691
[9]
Sze S.M, 1969, PHYS SEMICONDUCTOR D, P587
←
1
→
共 9 条
[1]
EVIDENCE FOR VOID INTERCONNECTION IN EVAPORATED AMORPHOUS-SILICON FROM EPITAXIAL CRYSTALLIZATION MEASUREMENTS
BEAN, JC
论文数:
0
引用数:
0
h-index:
0
BEAN, JC
POATE, JM
论文数:
0
引用数:
0
h-index:
0
POATE, JM
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 59
-
61
[2]
BOZLER CO, 1979, TECH DIG INT ELECTRO
[3]
CHARACTERIZATION OF EPITAXIAL METAL SILICIDE FILMS GROWN ON SILICON
ISHIWARA, H
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
ISHIWARA, H
HIKOSAKA, K
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
HIKOSAKA, K
NAGATOMO, M
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
NAGATOMO, M
FURUKAWA, S
论文数:
0
引用数:
0
h-index:
0
机构:
Graduate School of Science and Engineering, Tokyo Institute of Technology, Midoriku, Yokohama, 227, Nagatsuda
FURUKAWA, S
[J].
SURFACE SCIENCE,
1979,
86
(JUL)
: 711
-
717
[4]
CHANNELING AND BACKSCATTERING STUDIES OF THE CRYSTALLINE PERFECTION AND THE THERMAL-STABILITY OF EPITAXIAL PTSI FILMS ON SI
ISHIWARA, H
论文数:
0
引用数:
0
h-index:
0
机构:
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
ISHIWARA, H
HIKOSAKA, K
论文数:
0
引用数:
0
h-index:
0
机构:
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
TOKYO INST TECHNOL, GRAD SCH SCI & ENGN, MIDORI KU, YOKOHAMA 227, JAPAN
HIKOSAKA, K
论文数:
引用数:
h-index:
机构:
FURUKAWA, S
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(08)
: 5302
-
5306
[5]
ISHIWARA H, P S THIN FILM INTERF
[6]
SOLID-PHASE EPITAXY IN SILICIDE-FORMING SYSTEMS
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH, PASADENA, CA 91125 USA
CALTECH, PASADENA, CA 91125 USA
LAU, SS
LIAU, ZL
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH, PASADENA, CA 91125 USA
CALTECH, PASADENA, CA 91125 USA
LIAU, ZL
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH, PASADENA, CA 91125 USA
CALTECH, PASADENA, CA 91125 USA
NICOLET, MA
[J].
THIN SOLID FILMS,
1977,
47
(03)
: 313
-
322
[7]
HETEROSTRUCTURE BY SOLID-PHASE EPITAXY IN SI(111)-PD-SI(AMORPHOUS) SYSTEM
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
LAU, SS
LIAU, ZL
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
LIAU, ZL
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
NICOLET, MA
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
MAYER, JW
[J].
JOURNAL OF APPLIED PHYSICS,
1977,
48
(03)
: 917
-
919
[8]
SILICON EPITAXY BY SOLID-PHASE CRYSTALLIZATION OF DEPOSITED AMORPHOUS FILMS
ROTH, JA
论文数:
0
引用数:
0
h-index:
0
机构:
HUGHES RES LABS,MALIBU,CA 90265
HUGHES RES LABS,MALIBU,CA 90265
ROTH, JA
ANDERSON, CL
论文数:
0
引用数:
0
h-index:
0
机构:
HUGHES RES LABS,MALIBU,CA 90265
HUGHES RES LABS,MALIBU,CA 90265
ANDERSON, CL
[J].
APPLIED PHYSICS LETTERS,
1977,
31
(10)
: 689
-
691
[9]
Sze S.M, 1969, PHYS SEMICONDUCTOR D, P587
←
1
→