QUENCHING RATE OF ARGON METASTABLE STATE ATOMS IN HIGH-FREQUENCY AR-C4F8 DISCHARGES

被引：3

作者：

CLAUDE, R

MOISAN, M

RICARD, A

WERTHEIMER, MR

机构：

来源：

CHEMICAL PHYSICS LETTERS | 1990年 / 166卷 / 5-6期

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

10.1016/0009-2614(90)87137-G

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A method is described for measuring the quenching rate coefficient kt of rare gas atoms in a given metastable state by a molecule acting within the discharge. This method provides "in situ" rates which take into account the quenching of metastables by both the molecule and its fragments. Such a method is applied to determine the quenching rate of Ar(3P2) metastables by C4F8 and by CF4 molecules, yielding kt values of (9±2) × 10-10 and (2±1.5) × 10-11 cm-3 s-1, respectively. In situ rates are essential for accurate modelling of plasma processes. © 1990.

引用

页码：480 / 484

页数：5

共 9 条

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