ULTRAMICROHARDNESS OF ALUMINUM AND ALUMINUM-ALLOY THIN-FILMS

被引：8

作者：

DIRKS, AG

WIERENGA, PE

VANDENBROEK, JJ

机构：

来源：

THIN SOLID FILMS | 1989年 / 172卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90117-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：51 / 60

页数：10

共 15 条

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[9] THE COMPOSITION DEPENDENCE OF INTERNAL-STRESS, ULTRAMICROHARDNESS AND ELECTRICAL-RESISTIVITY OF BINARY ALLOY-FILMS CONTAINING SILVER, ALUMINUM, GOLD, COBALT, COPPER, IRON OR NICKEL [J].

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[10] ULTRAMICROHARDNESS MEASUREMENTS OF COATED SAMPLES [J].

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