DISTORTION OF DEPTH PROFILES DURING SPUTTERING .1. GENERAL DESCRIPTION OF COLLISIONAL MIXING

被引：173

作者：

SIGMUND, P

GRASMARTI, A

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1980年 / 168卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(80)91281-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：389 / 394

页数：6

共 23 条

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