ANALYTICAL ELECTRON-MICROSCOPY OF AL/TIN CONTACTS ON SILICON FOR APPLICATIONS TO VERY LARGE-SCALE INTEGRATED DEVICES

被引:31
作者
ARMIGLIATO, A [1 ]
VALDRE, G [1 ]
机构
[1] UNIV BOLOGNA,DEPARTIMENTO FIS,I-40126 BOLOGNA,ITALY
关键词
D O I
10.1063/1.338837
中图分类号
O59 [应用物理学];
学科分类号
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页码:390 / 396
页数:7
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