THE MECHANICAL-PROPERTIES OF POROUS SILICON MEMBRANES

被引：4

作者：

DRORY, MD

SEARSON, PC

LIU, L

机构：

[1] Materials Research Laboratory, SRI International, Menlo Park, 94105, CA

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1991年 / 10卷 / 02期

关键词：

D O I：

10.1007/BF00721915

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：81 / 82

页数：2

共 9 条

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[2]

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[5]

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[7] A NEW FORMATION PROCESS OF ANODIZABLE STRUCTURES OF N,N+, AND N- SILICON FOR THE PRODUCTION OF SILICON-ON-INSULATOR STRUCTURES [J].

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[8] FABRICATION OF SILICON MICROSTRUCTURES BASED ON SELECTIVE FORMATION AND ETCHING OF POROUS SILICON [J].

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[9] FORMATION AND PROPERTIES OF POROUS SILICON AND ITS APPLICATION [J].

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