HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED BY AN ION-BEAM-SPUTTERING TECHNIQUE

被引：7

作者：

KOBAYASHI, M

SARAIE, J

MATSUNAMI, H

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 09期

关键词：

D O I：

10.1063/1.92482

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：696 / 697

页数：2

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