RAMAN-SCATTERING FROM H-TERMINATED OR O-TERMINATED POROUS SI

被引:75
作者
TSANG, JC
TISCHLER, MA
COLLINS, RT
机构
[1] IBM T. J. Watson Research Center, Yorktown Heights, NY 10598
关键词
D O I
10.1063/1.107054
中图分类号
O59 [应用物理学];
学科分类号
摘要
The dependence of the crystalline structure of porous Si on the bonding of surface Si atoms to either H or O has been studied by Raman spectroscopy. H terminated porous Si shows microcrystalline character while O terminated porous Si shows atomic disorder within the Si particles.
引用
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页码:2279 / 2281
页数:3
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