ION-IMPLANTATION AND SPUTTERING IN THE PRESENCE OF REACTIVE GASES - BOMBARDMENT-INDUCED INCORPORATION OF OXYGEN AND RELATED PHENOMENA

被引：45

作者：

WACH, W

WITTMAACK, K

机构：

来源：

关键词：

D O I：

10.1063/1.329156

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3341 / 3352

页数：12

共 47 条

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[13] CASTELLANO RN, 1977, 7TH P INT VAC C 3RD, P1449
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[19] ION-BEAM-INDUCED ATOMIC MIXING
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[20] CESIUM-ION BOMBARDMENT OF ALUMINUM OXIDE IN A CONTROLLED OXYGEN ENVIRONMENT
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