THE PROPERTIES OF AMORPHOUS-CARBON FILMS OBTAINED BY ION-BEAM-ASSISTED CARBON EVAPORATION

被引:13
作者
SCHROER, A
ENSINGER, W
FRECH, G
WOLF, GK
机构
[1] Physikalisch-Chemisches Institut der Universität Heidelberg, 6900 Heidelberg
关键词
D O I
10.1016/0257-8972(91)90307-I
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Hard amorphous carbon films (a-C) with low hydrogen content have been produced by evaporation of graphite and simultaneous bombardment with inert ions in the energy range E greater-than-or-equal-to 3 keV. Nuclear resonance analysis showed that there is a relationship between the arrival ratio of ions to atoms and the hydrogen concentration in the layer. The corrosion properties of a-C layers on a low carbon steel were studied and the first results from multilayers (a-C/TiC/Ti) on iron are discussed.
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页码:418 / 425
页数:8
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