STRESS-RELATED EFFECTS IN THIN-FILMS

被引:980
作者
THORNTON, JA
HOFFMAN, DW
机构
[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
[2] FORD MOTOR CO,RES STAFF,DEARBORN,MI 48121
关键词
Metals and Alloys--Thin Films - Sputtering - Stresses--Thermal;
D O I
10.1016/0040-6090(89)90030-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The purpose of this paper is to review some of the considerations that are important in the occurrence of stresses in metal coatings. The discussion is generally from the point of view of decorative coatings. Thus particular emphasis is given to the stress-related effects that occur when brittle, high temperature coatings such as chromium are deposited on low temperature substrates such as acrylonitrile butadiene styrene. Recent sputtering studies are described which indicate that the apparatus geometry is particularly important in determining the state of stress that forms in such coatings. This paper was originally published in a 1979 conference proceedings.
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页码:5 / 31
页数:27
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