DISTRIBUTION OF ELECTRON-ENERGY IN AN ELECTROSTATICALLY CONFINED SILANE PLASMA

被引：5

作者：

ANDREU, J

SARDIN, G

LLORET, A

ESTEVE, J

MORENZA, JL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.339989

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1230 / 1232

页数：3

共 13 条

[1] FILAMENT DISCHARGE PLASMA OF ARGON WITH ELECTROSTATIC CONFINEMENT [J].

ANDREU, J ;

SARDIN, G ;

ESTEVE, J ;

MORENZA, JL .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1985, 18 (07) :1339-1345

[2] ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN ELECTRON-BEAM-SUSTAINED DISCHARGES - APPLICATION TO MAGNETIC MULTICUSP HYDROGEN DISCHARGES [J].

BRETAGNE, J ;

DELOUYA, G ;

GORSE, C ;

CAPITELLI, M ;

BACAL, M .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1985, 18 (05) :811-825

[3] THE EFFECT OF SECONDARY ELECTRONS ON PLASMA POTENTIAL IN A MULTI-DIPOLE DEVICE [J].

CHAN, C ;

INTRATOR, T ;

HERSHKOWITZ, N .

PHYSICS LETTERS A, 1982, 91 (04) :167-170

[4]

CHEN FF, 1965, PLASMA DIAGNOSTIC TE, P131

[5] A SPECTROSCOPIC ELLIPSOMETRY STUDY OF THE NUCLEATION AND GROWTH OF PLASMA-DEPOSITED AMORPHOUS-SILICON [J].

DREVILLON, B .

THIN SOLID FILMS, 1985, 130 (1-2) :165-170

[6] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE [J].

DREVILLON, B ;

HUC, J ;

LLORET, A ;

PERRIN, J ;

DEROSNY, G ;

SCHMITT, JPM .

APPLIED PHYSICS LETTERS, 1980, 37 (07) :646-648

[7] DETECTION OF SECONDARY ELECTRONS IN A MULTIDIPOLE PLASMA [J].

HERSHKOWITZ, N ;

GOETTSCH, RL ;

CHAN, C ;

HENDRICKS, K ;

CARPENTER, RT .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (07) :5330-5332

[8] APPLICATION OF PENNING DISCHARGE TO THE DEPOSITION OF AMORPHOUS-SILICON [J].

HIRAO, T ;

MORI, K ;

KITAGAWA, M ;

ISHIHARA, S ;

OHNO, M ;

NAGATA, S ;

WATANABE, M .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (12) :7453-7455

[9] PLASMA ELECTRON-ENERGY DISTRIBUTION OF A BEAM-PLASMA TYPE ION-SOURCE [J].

ISHIKAWA, J ;

EKTESSABI, AM ;

TAKAGI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (02) :309-314

[10] DISSOCIATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT [J].

PERRIN, J ;

SCHMITT, JPM ;

DEROSNY, G ;

DREVILLON, B ;

HUC, J ;

LLORET, A .

CHEMICAL PHYSICS, 1982, 73 (03) :383-394

← 1 2 →