A NEW TYPE OF MISFIT DISLOCATION MULTIPLICATION PROCESS IN INXGA1-XAS/GAAS STRAINED-LAYER SUPERLATTICES

被引:44
作者
LEFEBVRE, A
HERBEAUX, C
BOUILLET, C
DIPERSIO, J
机构
[1] Laboratoire de Structure et Propriétés de l’État Solide, Université des Sciences et Techniques de Lille Flandres-Artois, Villeneuve d’Ascq Cedex, 59655
关键词
D O I
10.1080/09500839108206597
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new misfit dislocation multiplication process has been observed for the first time in In(x)Ga1-(x)As/GaAs strained-layer superlattices (with x < 0.20). Transmission electron microscopy reveals that this process is based on the occurrence of interactions between perpendicular 60-degrees misfit dislocations with identical Burgers vectors and cross-slip events on the resulting dislocation configurations. The last stage of the process involves the operation of Frank-Read sources that emit glissile dislocations into the {111} planes; parts of the half-loops which develop towards the superlattice are parallel to the interface and are then new misfit dislocations.
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页码:23 / 29
页数:7
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