THRESHOLD SPUTTERING EFFECTS IN A CU-AU ALLOY

被引：11

作者：

NELSON, GC ^{[1
]}

BASTASZ, R ^{[1
]}

机构：

[1] SANDIA NATL LABS,DIV PHYS RES,LIVERMORE,CA 94550

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571416

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：498 / 501

页数：4

共 21 条

[1]

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[2]

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