共 19 条
[1]
EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THICK METAL AND CERAMIC DEPOSITS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (04)
:671-674
[6]
BURNETT PJ, 1987, SURFACE ENG, V3, P195
[7]
MICROSTRUCTURE EVOLUTION IN TIN FILMS REACTIVELY SPUTTER DEPOSITED ON MULTIPHASE SUBSTRATES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (03)
:500-503
[9]
Matthews A., 1985, SURF ENG, V1, P93