OPTICAL ANALYSIS OF THIN GOLD-FILMS BY COMBINED REFLECTION AND TRANSMISSION ELLIPSOMETRY

被引：10

作者：

OHLIDAL, I

LUKES, F

机构：

来源：

THIN SOLID FILMS | 1981年 / 85卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90629-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：181 / 190

页数：10

共 10 条

[1]

Abeles F., 1963, PROGRESS OPTICS, V2, P249

[2] COMBINED REFLECTION AND TRANSMISSION THIN-FILM ELLIPSOMETRY - UNIFIED LINEAR ANALYSIS [J].

AZZAM, RMA ;

ELSHAZLYZAGHLOUL, M ;

BASHARA, NM .

APPLIED OPTICS, 1975, 14 (07) :1652-1663

[3] INTERNAL REFLECTION ELLIPSOMETRY FOR METAL DEPOSITS [J].

CHAN, EC ;

MARTON, JP .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (10) :4027-&

[4]

Chopra K.L, 1969, THIN FILM PHENOMENA

[5]

HEAVENS OS, 1964, PHYS THIN FILMS, V2, P193

[6] PARAMETER-CORRELATION AND COMPUTATIONAL CONSIDERATIONS IN MULTIPLE-ANGLE ELLIPSOMETRY [J].

IBRAHIM, MM ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (12) :1622-&

[7] LEAST-SQUARES ANALYSIS OF FILM-SUBSTRATE PROBLEM IN ELLIPSOMETRY [J].

LOESCHER, DH ;

DETRY, RJ ;

CLAUSER, MJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) :1230-&

[8]

Marquardt WD, 1963, J SOC IND APPL MATH, V11, P431

[9]

Rouard P., 1965, PROGR OPTICS, V4, P147

[10] OPTICAL CONSTANTS OF SILVER, GOLD, COPPER, AND ALUMINUM .2. THE INDEX OF REFRACTION-N [J].

SCHULZ, LG ;

TANGHERLINI, FR .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1954, 44 (05) :362-368

← 1 →