SCANNING-TUNNELING-MICROSCOPY OF PASSIVATED GALLIUM-ARSENIDE UNDER AMBIENT CONDITIONS

被引:6
作者
DAGATA, JA
TSENG, W
SILVER, RM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 04期
关键词
D O I
10.1116/1.578443
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Scanning tunnel spectroscopy of n- and p-type GaAs (110) and (100) surfaces, prepared with a novel electrically transparent surface oxide, reveals that the current-voltage (I-V) characteristics of these surfaces obtained in air exhibit transport properties typical of the bulk band structure, a result which was previously obtained only on (110) GaAs surfaces cleaved in ultrahigh vacuum. The passivation technique has been used to obtain stable images of cleaved, molecular-beam epitaxy grown GaAs pn junctions in air as well. The results of this study demonstrate that quantitative doping information over the range of 10(15) < N(A),N(D) < 10(19) cm-3 can be extracted from scanning tunneling microscopy data on passivated GaAs surfaces under ambient conditions.
引用
收藏
页码:1070 / 1074
页数:5
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