共 10 条
[3]
Blum J. M., 1983, IBM Technical Disclosure Bulletin, V26, P921
[4]
JOUBERT P, 1987, J ELECTROCHEM SOC, V134, P2543
[5]
Kamins T., 1988, POLYCRYSTALLINE SILI
[6]
MADSEN LD, 1989, I PHYS C SER, V100, P593
[7]
Meyerson B. S., 1986, CHEMTRONICS, V1, P150
[9]
DEPOSITION OF PHOSPHORUS DOPED SILICON FILMS BY THERMAL-DECOMPOSITION OF DISILANE
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
1984, 23 (07)
:L493-L495